Cu Single Crystal Substrate: (110), 10mmDia. x1.0 mm, 1 side polished, Anode Warranty One-year limited warranty with

Warranty One-year limited warranty with lifetime support (rusted and damaged parts due to improper storage condition or maintenance are not covered by warranty)

Power failure mode allows the pump to continue pumping after resetting

Interface: CF35

Note: The outer diameter of the center of the tube is slightly longer

Film target thickness:       11 um  with  (thickness acceptation range) +/- 10%

Cu Single Crystal Substrate: (110), 10mmDia. x1.0 mm, 1 side polished, Anode Warranty One-year limited warranty withSingle crystal copper metallic substrate Purity: > 99. 99% (Oxygen < 80 ppm) Size: 10mm Dia x 1. 0 mm thickness Ori.: <110> + 2 o Edge orientation available with high cost upon request ! Surface finish (RMS or Ra) : One side polished < 30A Packing: in 1000 class cleanroom with vacuumed bag Application: substrates for metal, alloy film and biological material