F08600 - SEMI F86 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F86-0304 - Superseded SEMI T9-1110 (Reapproved 0216)

SEMI T9-1110 (Reapproved 0216)

which are typically measured for the characterization and qualification of device manufacturing steps

本文書はレチクルを扱う装置でのホスト・装置間通信に関する暫定スタンダードである。装置にはレチクルポッドの内外でレチクルを扱う装置だけが含まれる。

NOTICE: This Standard is no longer published with the SEMI E54 suite of Standards

SEMI C34-0699 (first published - replaces SEMI C2

F08600 - SEMI F86 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F86-0304 - Superseded SEMI T9-1110 (Reapproved 0216)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,