Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Part No: F52-60001 Rev

Part No: F52-60001 Rev

Made in the USA This Tosoh Quartz 500148554 Flat Quartz Bump Plate is new surplus

img{max-width:100%} Nikon Precision 2S014-066 PCB Interface Board MIC-ISA OPTISTATION 7 Working

Inventory # 13400

Made in Japan Included Components

Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Part No: F52-60001 RevHitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM Used Inventory # A 12824 This Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: Alignment Unit Configured for 300mm Wafers Removed from a Hitachi FEM 312 EFEM Equipment Front End Module Installed Components Hitachi PCB Part