P00800 - SEMI P8 - Test Method for the Determination of Water in Photoresist Revision:SEMI P8-90 - Superseded SEMI S5-0616 (technical revision)

SEMI S5-0616 (technical revision)

or Inductively Couples Plasma-Mass Spectroscopy (VPD/ICP-MS)

and equipment design and process improvements

SEMI D21-1000 (technical revision)

微粒子の静電気吸着を低減することによる汚染管理では，領域の静電気のリスクは静電気の電荷の存在とレベルによって定義される。

P00800 - SEMI P8 - Test Method for the Determination of Water in Photoresist Revision:SEMI P8-90 - Superseded SEMI S5-0616 (technical revision)This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1984; previously published September 1997. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status