MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI MF1763-0318 (technical revision)

SEMI MF1763-0318 (technical revision)

SEMI MF1727-1110 (technical revision)

SEMI M38-1101 (technical revision)

This Practice is intended primarily as a guide in preparing an optical microscope for dimensional measurements and is used in conjunction with the instruction manual provided by the manufacturer

The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry

MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI MF1763-0318 (technical revision)1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)