E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 and other microelectronic components including

and other microelectronic components including microelectromechanical systems (MEMS)

and/or customer’s specified percentages of maximum rated flow

This Standard describes a specific device structure and behavior of a generic equipment networked sensor

2  This Specification addresses assembly and packaging including the testing of semiconductor devices

SEMI D58-0823 (technical revision)

E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 and other microelectronic components includingDue to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight. The parallel input output (PI O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load unload) at production equipment load ports. The purpose of