E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded 1 This Guide does not

1  This Guide does not include site-specific conditions

Health and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S13 — Environmental

These dimensions apply to substrates that are principally used in fabricating AMLCD displays

orgで入手可能となる。初版は1995年発行。前版は2002年11月発行。

E00100 - SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様 Revision:SEMI E1-1110 - Superseded 1 This Guide does notNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 3100 mm125 mm150 mm200 mm 3100 mm125 mm150 mm 125 mm 200 mm Referenced SEMI Standards (purchase separately) None.