G07800 - SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements StdPbc-0718 and SEMI C6

and SEMI C6

SEMI S14-1102 (technical revision)

This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling

that might not be covered in other applicable safety guidelines and standards for industrial robots

SEMI E125-0703 (first published)

G07800 - SEMI G78 - Test Method for Comparing Automated Wafer Probe Systems Utilizing Process-Specific Measurements StdPbc-0718 and SEMI C6This test method was technically approved by the global Automated Test Equipment Committee and is the direct responsibility of the North American Automated Test Equipment Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at www. semi. org April 1999; to be published June 1999. To define the terms and provide a means of comparative, or relative measurement for the automated