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C00357 - SEMI C3.57 - シリンダ中の電子的グレード二酸化炭素，CO2の仕様 Revision:SEMI C3.57-0312 - Superseded NOTICE: This Document was balloted
C00357 - SEMI C3.57 - シリンダ中の電子的グレード二酸化炭素，CO2の仕様 Revision:SEMI C3.57-0312 - Superseded NOTICE: This Document was balloted
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Description
NOTICE: This Document was balloted and approved for withdrawal in 2012
detailed specifications
The contacting method has more accuracy than light interference method
The scope of this Document covers high purity hafnium amides
which provides uniform illumination of the specimen
C00357 - SEMI C3.57 - シリンダ中の電子的グレード二酸化炭素，CO2の仕様 Revision:SEMI C3.57-0312 - Superseded NOTICE: This Document was ballotedglobal Gases Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org20006 (CO2) (CO2) Referenced SEMI Standards None.
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