F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0312 - Superseded This Test Method provides procedures

This Test Method provides procedures for the determination of relative radial variation of resistivity of semiconductor wafers cut from silicon single crystals grown either by the Czochralski or floating-zone technique

These properties are listed together with test methods suitable for determining their magnitude where such procedures are documented

These test methods have been shown to give statistically valid results

SEMI MF847 — Test Method for Measuring Crystalographic Orientation of Flats on Single Crystal Silicon Wafers by X-ray Techniques

SEMI M20 — Specification for Establishing a Wafer Coordinate System

F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0312 - Superseded This Test Method provides proceduresNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,