C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive To accelerate improvements of packaged

To accelerate improvements of packaged MEMS devices

orgで入手可能となる。初版は1990年発行，前版は2004年7月発行。

SEMI E84-0303 (technical revision)

determined by doping with carbon

원본은 1992년에 발행되었고

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive To accelerate improvements of packagedThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene