S01600 - SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド Revision:SEMI S16-0307 (Reapproved 0812) - Inactive 26-0301 (technical revision)

26-0301 (technical revision)

1-0310 - 装置クライアントの認証および権限付与（ECA）のためのSOAPバインディングの仕様

This Guide addresses universal alignment mark

and message services that enable the host computer to obtain the equipment data required for equipment performance tracking in an automated and consistent matter without operator or host input

Data Types

S01600 - SEMI S16 - 製品寿命時の環境影響を削減するための半導体製造装置設計ガイド Revision:SEMI S16-0307 (Reapproved 0812) - Inactive 26-0301 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org2000620073 NOTICE: This Standard or Safety Guideline has an Inactive Status because the