Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Inventory # A-17173

Inventory # A-17173

Model No: 3M86-027269-11

Inventory # A-8084

Inventory # K-7169

Software sales are non- refundable

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Inventory # A-17173Trikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM