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E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces • Helium (He)
E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces • Helium (He)
$115.50
Description
• Helium (He)
SEMI C36-0301 (technical revision)
released from semiconductor manufacturing operations
originally published October 2011
should also be utilized
E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces • Helium (He)global Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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