TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 080627

Part No: 080627

Range: 200 SCCM

Removed from a Karl Suss MJB 55 Wafer Mask Aligner System This Karl Suss 455-01 PCB Card is used working surplus

Orbot Instruments 1280087 WFALIGNER RV3 ALIGN PCB Card AMAT WF 720 Used Working

Part No: 02-30030

TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Part No: 080627TEL Tokyo Electron 51161 802 001 Interface Block Robot IRAM Lithius w 300mm Fork Part No: 51161 802 001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M SSB020FN502 NSK Linear Stage Slide Part No: XY HRS025ZRS202 Parts List Assembly Part No: 5087 403668 12, IRAM (LITHIUS IPL), X AXIS 5080 192746 11: BASE,FORK IRAM XY P5179