M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI M8-0703 (technical revision)

SEMI M8-0703 (technical revision)

and completion of automated and manual carrier transfers to and from the equipment and

Application of this Test Method is expected to yield comparable data among filters or gas systems

These characteristics and behaviors are required to be implemented

and specimen surface preparation specified in this Test Method are to be preferred for all referee measurements on bulk silicon wafers

M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components SEMI M8-0703 (technical revision)global Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline