P04700 - SEMI P47 - ラインエッジラフネス（Line Edge Roughness）およびライン幅ラフネス（Line Width Roughness）測定の試験方法 StdPbc-0218 This Standard will cover the

This Standard will cover the quality criteria and the associated test method for impurities contained in PE bags used for polysilicon feedstock packaging

26-84 (first published)

orgで入手可能となる。前版は2012年4月発行。

stroboscopic interferometer or comparable instrument that is capable of obtaining the resonance frequency of a beam oscillating out-of-plane

This Document defines terminology for FPD masks

P04700 - SEMI P47 - ラインエッジラフネス（Line Edge Roughness）およびライン幅ラフネス（Line Width Roughness）測定の試験方法 StdPbc-0218 This Standard will cover theglobal Microlithography Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM IC Referenced SEMI Standards SEMI P19 Specification for Metrology Pattern Cells for Integrated Circuit Manufacture SEMI P35 Terminology for Microlithography Metrology SEMI P36 Guideline of Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes