Varian 106564001 Automatic Cryopump Regeneration Controller Rev. B No Key Spare Model No: DAQ MICRO

Model No: DAQ MICRO

Part No: JUS-MSI

Model No: PI-980 Series

This NOVELLUS 244136 is used working surplus

Fab No: 0360-1152 C2

Varian 106564001 Automatic Cryopump Regeneration Controller Rev. B No Key Spare Model No: DAQ MICROVarian 106564001 Automatic Cryopump Regeneration Controller Rev. B No Key Spare Inventory # CONJ 2013 Part No: 106564001 Model No: AUTOMATIC CRYOPUMP REGENERATION Rev. B Made in the USA This Varian 106564001 Automatic Cryopump Regeneration Controller is used working surplus. The unit does not include a key and is missing a hold down screw (see photos). The physical condition is good, but there are signs of previous use and handling. Sale Details Item