M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current SEMI C44 — Specification and

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diatomic gas comprising approximately 78% of the earth’s atmosphere

M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current SEMI C44 — Specification andThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in