E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-FPD Substrates This Guide incorporates the following

This Guide incorporates the following methodologies:

The filter housing and filtration element are combined into one sealed and inseparable unit

Report reasons to a host computer for why equipment is blocked from performing its task

This procedure applies to clean filters including those cartridges of metal

and Dead Band of Thermal Mass Flow Controllers

E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-FPD Substrates This Guide incorporates the followingThe purpose of this Standard is to define a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for the following: Determining the electrical length of RF cable assemblies at the nominal operating frequency in terms of degrees of