F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 SEMI P35 — Terminology for

SEMI P35 — Terminology for Microlithography Metrology

file naming conventions

1  The scope of this Standard is automated material processing based on discrete processing jobs

This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification

SEMI E1 — Specification for 3 inch

F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 SEMI P35 — Terminology forNOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are