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F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded PCS適用範囲内での主要な機能化グループの特定，
F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded PCS適用範囲内での主要な機能化グループの特定，
$115.50
Description
PCS適用範囲内での主要な機能化グループの特定，
it is necessary to standardize the classification of Mura for LCD
or any other interested party
Wafers meeting the basic specification requirements herein are suitable for use as ‘mechanical handling’ wafers for equipment set-up and robotic handling applications
no materials requirements or micro-contamination limits are given in this Specification
F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded PCS適用範囲内での主要な機能化グループの特定，global Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 NH3 AsH3 PH3 Referenced SEMI Standards None.
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 - Superseded PCS適用範囲内での主要な機能化グループの特定，){kind=link}